REGULATION OF HYDROPHILIC-HYDROPHOBIC PROPERTIES OF SILICON WAFERS

The possibility of a wide range adjustment the hydrophilic-hydrophobic properties silicon wafers is demonstrated by means treatment with hydrofluoric acid, Caro's and various concentrations hydrogen peroxide solutions. By measuring contact angles wetting calculating total, polar, dispersive components surface energy, it has been found that most significant hydrophilization as well maximum increase in energy are achieved when surfice treated Caro’s while consecutive processing acid leads to prominent hydrophobization decrease energy.